The MME workshop is a well established and recognized European event in the field of micromachining, microengineering and technology for the realization of (micro)sensors and actuators. Scientists and people from industry interested in the field gather annually at the MME workshop. The goals are stimulation and improvement of know-how in the field as well as the establishment of cooperation and friendship between all attendees. MME is arranged so that people can meet in a friendly and informal atmosphere. Therefore the accent lies on mutual discussions as part of poster presentations rather than on formal oral presentations.